data sheet the new generation turbo pump with agilent floating suspension the agilent twistorr 304 fs turbomolecular high-vacuum pump combines twistorr drag stage technology and agilent floating suspension to provide high performance, reliability, and economy. twistorr drag stages create high compression ratios for light gases such as hydrogen and helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. this technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. the agilent floating suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stability over time. the unique bearing and dry lubrication in the twistorr 704 fs eliminate oil and maintenance, and permit operation of the pump in any orientation. available with onboard or rack controllers. agilent twistorr 304 fs
2 technical specification pumping speed iso 100 / cf 6 iso 160 / cf 8 n 2 he h 2 ar 250 l/s 255 l/s 220 l/s 250 l/s 250 l/s 255 l/s 220 l/s 250 l/s gas throughput at full rotational speed (with recomm. forepump) ambient temp. (25 c) water temp. (25 c, 50 l/h) n 2 170 sccm 170 sccm ar 110 sccm 110 sccm compression ratio and foreline tolerance n 2 he h 2 ar > 1 x 10 11 > 1 x 10 8 1.5 x 10 6 > 1 x 10 11 >10 mbar >10 mbar >4 mbar >10 mbar base pressure with recommended forepump (5 m 3 /h) < 1 x 10 -10 mbar (< 1 x 10 -10 torr) foreline flange kf16 nw (kf25 - optional) rotational speed 60000 rpm (1010 hz driving frequency) start-up time < 3 minutes technical specification recommended forepump mechanical: agilent ds 102 dry pump: agilent idp-7 operating position any oper. ambient temperature +5 c to +35 c rel. humidity of air 0 to 90% (not condensing) bakeout temperature 80 c at inlet flange max (iso flange) 120 c at inlet flange max (cff flange) lubricant permanent grease lubrication cooling requirements forced air (5- 35 c ambient temperature) water (mandatory if ambient temp. > 35 c) water temperature from +15c to +25c water flow min. 100l/h coolant water minimum flow: 50 l/h (0.89 gpm) temperature: +15 c to +30c pressure: 3 to 5 bar (45 to 75 psi) noise pressure level < 50 db(a) at 1 meter max altitude 3000 m weight kg (lbs) pump iso 100 pump cff 6 pump iso 160 pump cff 8 5.5 kg (12.3) 7.5 kg (16.5) 5.7 kg (12.6) 9.7 kg (20.9) conformity to norms emc (control units) safety (ce/csa) rohs 61326-1 dir 2006/42/ce dir 2011/65/eu outline drawing dimensions: millimeters [inches] technical specification 3d drawings available for download iso 100k cff 6" foreline flange kf16 electrical connec to r wa ter cooling vent screw foreline flange kf16 electrical connec to r wa ter cooling purge screw purge screw vent screw 144 [5.67] ? 179.18 [7.05] 134.63 [5.30] 134.63 [5.30] 99.2 [3.91] 186.53 [7.34] 141.98 [5.59] 144 [5.67] 141.98 [5.59] 106.55 [4.19] 27 144 [5.67] 86.29 [3.40] 38 [1.50] 86.5 [3.41] 3 6 27 27 144 [5.67] 86.29 [3.40] 38 [1.50] 86.5 [3.41] 3 6 27 39 39 ?
3 ordering information pumps configuration options twistorr 304 fs iso 100 water cooling x3511-64007 twistorr 304 fs cff 6 water cooling x3500-64001 twistorr 304 fs iso 160 water cooling x3500-64002 twistorr 304 fs cff 8 water cooling x3500-64003 twistorr 304 fs iso100 air cooling x3500-64004 twistorr 304 fs cff 6 air cooling x3500-64005 twistorr 304 fs iso 160 air cooling x3500-64006 twistorr 304 fs cff 8 air cooling x3500-64007 twistorr 304 fs iso 100 sf water cooling x3500-64010 controllers part numbers twistorr 304 fs ag rack controller with rs232/485 x3506-64002 twistorr 304 fs ag rack controller with profibus x3506-64003 twistorr 304 fs onboard controller 24 vdc x3507-64002 twistorr 304 fs onboard controller 100-240 vac x3507-64003 cables part numbers mains cable nema plug, 3 m long 9699958 mains cable european plug, 3 m long 9699957 serial cable and a-plus software 9699883 serial cable & t-plus software 9699883 extension cable 9699948m007 ( 5 m ) 9699948m006 ( 10 m ) 9699948m005 ( 15 m ) 9699948m004 ( 20 m ) inlet screen part numbers inlet screen iso 100 x3500-68000 inlet screen cff 6 9699302 inlet screen iso 160 x3500-68001 inlet screen cff 8 9699304 cooling part numbers water cooling kit 9699337 plastic water cooling kit 9699347 air cooling kit for onboard controller x3500-68010 fan extension cable for onboard controller 9699949 air cooling kit for rack ag controller x3500-68011 fan extension cable for rack ag controller 9699940 vibration isolator part numbers vibration isolator iso 100 9699344 vibration isolator cf 6 9699334 vibration isolator iso 160 9699345 vibration isolator cf 8 9699335 vibration isolator iso 100 idx 9699396 vent flange, nw 10 kf / m8 9699108 venting part numbers delay vent valve 1.2 mm orifice x3505-68000 delay vent valve 0.5 mm orifice x3505-68001 vent valve n.o. for rack ag controller (0.5 mm) 9699844 vent valve for onboard controller (1.2 mm) 9699834 vent valve for onboard controller (0.5 mm) 9699834m006 purge part numbers purge valve 10 sccm nw16kf - m12 9699239 purge valve 10 sccm ? swagelok - m12 9699240 purge valve 20 sccm nw16kf - m12 9699241 purge valve 20 sccm ? swagelok - m12 9699242 purge valve 10 sccm ? swagelok - ? swagelok 9699232 purge valve 20 sccm ? swagelok - ? swagelok 9699236 mounting part numbers bracket for onboard controller side mounting x3500-68012 foreline flange kf25 x3500-68002 active gauges part numbers frg 700 full range gauge ask agilent for details pvg 500 pirani vacuum gauge ask agilent for details pcg 750 pirani capacitance gauge ask agilent for details cdg-500 capacitance diaphragm gauge ask agilent for details pumping speed pumping speed (l/s) compression ratio compression ratio inlet pressure (mbar) foreline pressure (mbar) hydrogen helium nitrogen argon 10 -9 10 -8 10 -7 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 10 0 0 100 200 300 400 500 600 700 10 -3 10 -2 10 -1 10 0 10 1 10 2 10 2 10 4 10 6 10 8 10 10 10 12 10 14 h2 helium nitrogen argon
www.agilent.com/chem/vacuum united states agilent technologies 121 hartwell avenue, lexington ma 02421, usa tel: +1 781 861 7200 toll free: +1 800 882 7426 vpl-customercare@agilent.com e urope and other countries agilent technologies italia spa via f.lli varian 54, 10040 leini, (torino), italy tel: +39 011 9979 111 toll free: 00 800 234 234 00 vpt-customercare@agilent.com this information is subject to change without notice. ? agilent technologies, inc. 2017 printed in the usa, october, 2017
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